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secs相关资料
- secs相关资料 半导体相关
SECS_II_introduction
- secs 协议部分文档,是从事半导体设备开发的有用参考-communication protocal document of SECS II
secs
- 半导体通讯协议，包含SECS-I SECS-II HSMS GEM讲解-include SECS-I SECS-II HSMS GEM
80xxGEM_SECS(x-xx-x-457_version) _Release
- 最新的半导体行业的SECS 通信协议技术规范(Technical specification for SECS communication protocol in semiconductor industry)
SECS&GEM
- SECS 资料详细介绍，从根本理解SECS(1.Introduction 2.What is GEM -SECS Message Format and Protocol -SECS II Message Stream and Function 3.Why is GEM Important to You 4.Experiment)
SECSGEM 介紹
- 简单介绍了SECS、GEM 是什么，SECS、GEM的关系。(This paper briefly introduces the relationship between SECS and GEM, SECS and GEM.)
半导体厂自动化之通讯协定 SECS III & GEM
- 基于SECS(I)串口通讯的 SECS通讯协议，主要介绍SECS（1） SECS（II）(SECS communication protocol based on SECS (I) serial port communication)